→ for 3 - 400 MHz high throughput applications

The EVOLUTION III is a high-performance tool enabling non destructive acoustic investigations for dedicated high throughput analysis, quality control and research applications. It features a new high speed maintenance free stage and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.

Built to semiconductor industry standards around a core platform that utilises the latest production and research technology, the EVOLUTION III can accurately handle wafers up to 300 mm and samples up to 320 mm x 200 mm x 45 mm (w/l/h).